| Type | Microprocessor |
| Data bus width | 64 bit |
| Package | 223-pin ceramic PGA |
| Speed (MHz) | 200 |
| Bus frequency (MHz) | up to 100 |
| Clock multiplier | from 2 to 8 |
| On-chip peripherals | Secondary cache controller |
| Level 1 cache size | 32 KB 2-way set associative instruction cache
32 KB 2-way set associative data cache |
| Level 2 cache size | external 512 KB, 1 MB or 2 MB |
| Floating Point Unit | Integrated |
| V core (V) | 3.3 ± 5% |
| Min/Max operating temperature (°C) | 0 - 85 |
| Min/Max power dissipation (W) | 0.4 (Standby mode) / 4.5 |
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R5000 family